Nano Fabrication Lab (NFL)
The NanoFabrication Lab (NFL) at ICFO is a transversal facility devoted to the fabrication and characterization of nanostructured photonic devices.
NFL Chair
Prof. Niek van Hulst
NFL Scientific Officer
Dr. Johann Osmond
Facility Staff
Francisco Javier Pérez Díaz
Paula Díaz Carreras
Available techniques
Thin film deposition
• Thermal and e-beam evaporation
• Sputtering
• Atomic Layer Deposition (ALD)
• Scanning Electron Microscopy (SEM)
Dry etching
• Reactive Ion Etching (RIE)
Surface topography
• Atomic Force Microscopy (AFM)
• Profilometry
Lithography
• E-beam lithography (EBL)
• Optical lithography (Maskless aligner)
Analysis and metrology
• Spectroscopic ellipsometry
Nanomachining and nanoanalytics
• Focused Ion Beam (FIB)
Surface activation and cleaning
• Plasma ashing/cleaning
• Ozone cleaning
Equipment
Lesker LAB18
Oxford Instruments Plasmalab System 100 ICP 180
Heidelberg Maskless Aligner MLA150
Zeiss Auriga CrossBeam
Current Fees